Where did they come from and when were they first used?
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tl;dr
"Foo" and "bar" as metasyntactic variables were popularised by MIT and DEC, the first references are in work on LISP and PDP-1 and Project MAC from 1964 onwards.
Many of these people were in MIT’s Tech Model Railroad Club, where we find the first documented use of "foo" in tech circles in 1959 (and a variant in 1958).
Both "foo" and "bar" (and even "baz") were well known in popular culture, especially from Smokey Stover and Pogo comics, which will have been read by many TMRC members.
Also, it seems likely the military FUBAR contributed to their popularity.
The use of lone "foo" as a nonsense word is pretty well documented in popular culture in the early 20th century, as is the military FUBAR. (Some background reading:
FOLDOC
FOLDOC
Jargon File
Jargon File
Wikipedia
RFC3092)
OK, so let’s find some references.
STOP PRESS! After posting this answer, I discovered this perfect article about "foo" in the Friday 14th January 1938 edition of The Tech ("MIT’s oldest and largest
newspaper & the first newspaper published on the web"), Volume LVII. No. 57, Price Three Cents:
The Tech newspaper, a year earlier, the Letter to the Editor, September 1937:
And The Tech in December 1938:
The first documented "foo" in tech circles is probably 1959‘s Dictionary of the TMRC Language:
These are explained at FOLDOC. The dictionary’s compiler Pete Samson said in 2005:
And from 1996’s Jargon File 4.0.0:
A year before the TMRC dictionary, 1958‘s MIT Voo Doo Gazette ("Humor suplement of the MIT Deans’ office") (PDF) mentions Foocom, in "The Laws of Murphy and Finagle" by John Banzhaf (an electrical engineering student):
Also 1964‘s MIT Voo Doo (PDF) references the TMRC usage:
Let’s find "foo", "bar" and "foobar" published in code examples.
So, Jargon File 4.4.7 says of "foobar":
The first published reference I can find is from February 1964, but written in June 1963, The Programming Language LISP: its Operation and Applications by Information International, Inc., with many authors, but including Timothy P. Hart and Michael Levin:
Also includes other metasyntactic variables such as: FOO CROCK GLITCH / POOT TOOR / ON YOU / SNAP CRACKLE POP / X Y Z
I expect this is much the same as this next reference of "foo" from MIT’s Project MAC in January 1964‘s AIM-064, or LISP Exercises by Timothy P. Hart and Michael Levin:
It shares many other metasyntactic variables like: CHI / BOSTON NEW YORK / SPINACH BUTTER STEAK / FOO CROCK GLITCH / POOT TOOP / TOOT TOOT / ISTHISATRIVIALEXCERCISE / PLOOP FLOT TOP / SNAP CRACKLE POP / ONE TWO THREE / PLANE SUB THRESHER
For both "foo" and "bar" together, the earliest reference I could find is from MIT’s Project MAC in June 1966‘s AIM-098, or PDP-6 LISP by none other than Peter Samson:
Some more recallations.
@Walter Mitty recalled on this site in 2008:
John V. Everett recalls in 1996:
Daniel P. B. Smith in 1998:
Robert Schuldenfrei in 1996:
Paul M. Wexelblat in 1992:
Bruce B. Reynolds in 1996:
Here’s a straight IBM "BAR" from 1955.
Other early references:
1967 foo bar MIT AIM-127
1967 foo bar MIT AIM-127a
1965 foo MIT Tech Engineering News
1968 foo baz DEC
1971 FOO BAR UCLA-NMC RFC269
1972 FOO MIT AI
1972 FOO MIT AI HAKMEM (PDF scan)
1972 FOO DEC
1973 FOO DEC
1973 foo bar International Joint Council on Artificial Intelligence
1975 foo bar International Joint Council on Artificial Intelligence
1977 Foobar
1978 Foobar
1978 Moby Foobar in Software Wars
I haven’t been able to find any references to foo bar as "inverted foo signal" as suggested in RFC3092 and elsewhere.
Here are a some of even earlier F00s but I think they’re coincidences/false positives:
1959 "FOO 31 IBM-704 Bettis Plant Uses a least squares technique" U.S. Atomic Energy Commission
1960 FOO (FO Out, F1, F2, FOO, FOI) "Digital computer and control engineering"
1967 FOO?